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PECVD Coating System for Silicon Nitride and Hetrojunctions |
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• High throughput Silicon Nitride Coating System
for Multi-crystalline Silicon Solar Cells. • High throughput system for Hetrojunctions. • Load Lock Entry with rapid heating. • Multiple PECVD zones. • Load Lock exit with cooling. • Modular system-throughput in the range of 200-475 wafers per hour. |
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View a
short movie of our SiNx inline system |
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