MVSystems, Inc.

Research and Development, Contracts, Foundry and Consultancy Services at MVSystems, Inc.

MVSystems, Inc. research and development facilities are equipped to develop a wide array of thin film technologies. State-of-art materials and devices obtained in the fields of, Nano-(or micro-) crystalline Silicon, Amorphous Silicon, Thin Film Si Solar Cells, TFT's, Imaging, Sensors, Transparent Conducting Oxides and Optically Addressed Spatial Light Modulators.

Contract R&D conducted for and with universities, government agencies, and companies worldwide.

Foundry service: using its in-house computer controlled large area PECVD and Sputtering System, MVSystems, Inc. can supply thin film materials and devices, such as,

• Amorphous silicon- instrinsic and doped.
• Nano (or micro-) crystalline silicon (instrinsic and doped)
• Dielectrics (SiNx, SiOx)
• Transparent conducting oxides (ITO, ZnO),
• Solar cells, TFT’s, imaging devices etc.

Facilities: In house laboratory space is equipped with state of the art safety systems to detect hazardous gases such as silane, as well as an effluent handling system.

(1) Large area cluster tool system - computer controlled (substrate size: 30 cm x 40 cm): 6 PECVD zones (with RF power sources and pulse modulation function), dual-sputtering system (with DC and RF power sources), and elevator with cartridge park station. Fully computer controlled.

Large area cluster tool system (substrate size: 30x40 cm2)

(2) Thermal evaporation system for metallization.
(3) A fully computerized system for measuring devices under Global AM1.5. Measures dark and light I-V parameters, and QE response.
(4) Conductivity as a function of temperature system.
(5) Infra red spectroscopy.
(6) UV/VIS transmission and reflection measurements. Intergrating sphere capability
(7) UV refelectance technique,
(8) Ellipsometery
(9) Profilometer for measuring film thickness.
(10) Optical emission spectrometer for monitoring plasma processing.
(11) Miscellaneous light sources, filters, oscilloscopes, a microscope and other general-purpose laboratory equipment.