Accessories

MVSystems also manufactures peripherals and assemblies for installation into existing deposition systems. The following sub-systems are available:

Substrate holder with heating and optional bias (DC and RF) and/or z-translation capability;
Hot wire CVD assembly
Evaporation “drawers”
Interlocked valve control boxes
Bubblers
Gas manifolds

Hot wire assembly

Thermal Evaporation assembly

Gas manifold cabinet